1750 Grade MoSi2 Heating Element (30x270mm) Processing Tubes

1750 Grade MoSi2 Heating Element (30x270mm) Processing TubesSpecifications D1: 12mm D2: 6mm A: 30mm L=L1+L2:=160+110=270mm Materials: MoSi2 Max. surface temperature: 1750 C Working temperature: 1700C (in air, < 1 hour) Max. 1600C ( in air) continuous 1600C (in N2) 1220C ~ 1500C (in H2) Volume Density: 5 ~ 5. 6g cm3 Bend strength: 15 ~ 25kg cm3 Vickers hardness: (HV) 570kg mm2) Porosity rate: 7. 4% Water absorption: 2% Heat extensibility: 4% Resistivity Properties of MoSi2 Heating Element The resistivity of

wait for 3 seconds

It can prevent precision wafer or substrate from damage and contamination during shipping and storing

Chamber Structure

Economic blades

Application case ----------------------  EQ-PCE-3

wafer InGaAs EPI on InP (Semi-insulating)(100) by MOCVD deposition

MTI supplies high quality hot pressed SiC cutting blades  with 4" diameter x 0

4" diameter

One pressing die sleeve

For Using MSK-AFA-I or MSK-AFA-III MTI-AFAIII-SR-100

Orientation:  (100)

the ceramic tube can be inserted into the tube with a vacuum-sealed on the flange