A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) Revision:SEMI A1-1025 - Current + Redline

A00100 - SEMI A1 - Specification for Production Equipment Smart Connection Interface (PESCI) Revision:SEMI A1-1025 - Current + Redline* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1

this document specifies a simple and practical method for commercial semi-insulating GaAs single crystals

has many differences as well

and subcomponents of high purity gas distribution systems in a semiconductor fabrication facility

Extreme & Optimality

SEMI M31-0307 (technical revision)

SEMI E125-0310 (technical revision)

本安全基準適用於由多家公司人員（如設備供應商、廠務設施供應商、使用者及其承攬商）共同使用的工作區。

001% (m/m) and 1

SEMI C23-0708 (technical revision)

本安全指導方針由全球環境、衛生及安全技術委員會(Environmental Health & Safety Technical Committee)技術核可，本版於2011年9月12日由全球審核與覆檢小組委員會核可，自2011年10月起可以於www

org로 문의 바랍니다

메소드(Method)가 레시피 가변 매개변수(recipe variable parameters)들을 이용하기 위해 정의되지만