E15400 - SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様 Revision:SEMI E154-1110 - Superseded

E15400 - SEMI E154 - 450 mmロードポートのためのメカニカルインタフェースの仕様 Revision:SEMI E154-1110 - SupersededNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI 450 mm FOUP450 mm MAC (SME) 450 mm FOUP450 mm MACSEMI Referenced SEMI Standards SEMI E63 Specification for 300 mm Box Opener Loader to Tool Standard (BOLTS M) Interface SEMI E110 Guideline for Indicator Placement Zone and Switch

本スタンダードは，global Facilities Technical Committeeで技術的に承認されている。現版は2012年8月30日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年10月にwww

or remove instances of objects (and manage collections of those objects) that support the CIM Framework specified interfaces

Initially available on www

particle filters

Some of these reasons are that:

本文書の範囲

The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment

SEMI E171-0524 (technical revision)

Method B may also be applied to the examination of the edge contour of the outer periphery of substrates for rigid disks used for magnetic storage of data

レチクルポッドとロードポートとの関連付け。

and to provide literature references where further details can be found

so called waviness