D00700 - SEMI D7 - FPD Glass Substrate Surface Roughness Measurement Method Revision:SEMI D7-94 (Reapproved 0703) - Inactive This Standard describes a Guide
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Description
This Standard describes a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications
Due to the migration to large substrate sizes in FPD production
and behavior a mass flow controller (MFC) and mass flow meter (MFM) device must support to be interoperable on the Sensor/Actuator Network
The purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information
D00700 - SEMI D7 - FPD Glass Substrate Surface Roughness Measurement Method Revision:SEMI D7-94 (Reapproved 0703) - Inactive This Standard describes a GuideThis Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www. semi. org in July 2003; originally published in 1994. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are
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