E16900 - SEMI E169 - Guide for Equipment Information System Security StdPbc-0724 SEMI E115-0302E (Reapproved 0309)

SEMI E115-0302E (Reapproved 0309)

SEMI E142-0224E (editorial revision)

This Standard specifies measuring methods

In this Test Method

E16900 - SEMI E169 - Guide for Equipment Information System Security StdPbc-0724 SEMI E115-0302E (Reapproved 0309)The purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more