F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive originally published October 2011

originally published October 2011

SEMI F27-0997 (first published)

Parameters such as edge length and diagonal of a wafer appear to be obvious

注意: 本文書は，編集上の修正を伴い，再承認された。

F06500 - SEMI F65 - Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes Revision:SEMI F65-1101 - Inactive originally published October 2011This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at www. semi. org September 2001; to be published November 2001. NOTICE: This Standard or Safety Guideline has an Inactive Status because the