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E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded SEMI E80-0299 (first published)
E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded SEMI E80-0299 (first published)
$193.00
Description
SEMI E80-0299 (first published)
35-89 (technical revision)
本方法は，破壊検査である。
SEMI E82-1101 (technical revision)
E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1104 (Reapproved 0816) - Superseded SEMI E80-0299 (first published)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical
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 - Superseded SEMI E80-0299 (first published)){kind=link}