MS00800 - SEMI MS8 - Guide to Evaluating Hermeticity of Microelectromechanical Systems (MEMS) Packages Revision:SEMI MS8-0309 (Reapproved 0915) - Superseded It oxidizes readily and rapidly

It oxidizes readily and rapidly to release hydrogen chloride

本テスト方法では，RF電源から出力される真の出力（つまり加熱電力）を決定するために必要なテスト手順および装置を指定する。このテスト方法では，参照スタンダードとして，正確なDC置換手法を使用して予め校正された熱量電力計を使用する。

originally published July 2001

Note: This Standard has been purposely restricted to 100 mm (4 in

MS00800 - SEMI MS8 - Guide to Evaluating Hermeticity of Microelectromechanical Systems (MEMS) Packages Revision:SEMI MS8-0309 (Reapproved 0915) - Superseded It oxidizes readily and rapidlyMicroelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interconnection. While there are a wide range of MEMS devices, a common need is for packaging that allows movement of the internal device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected from the environment and that appropriate interconnections are made. In many